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2500c high temperature induction heating vacuum CVD furnace

Type:Induction Furnace

Input Size:D300×600mm D400x800mm D500×1000mm D600x1200mm D800x1600mm

Processed Materials:The equipment is batch type induction furnace, mainly used for CVD in carbon carbon material and carbon composite material or graphite parts material.

Applications:vacuum vapor depostion

  • Overview
  • Specifications
  • Features

1.Application:

The equipment is batch type induction furnace, mainly used for CVD in carbon carbon material and carbon composite material or graphite parts material.

2.Configuration:

380V±5%50Hz/60Hz 3 phase 5 wire

One control cabinet to one furnace, the facility equipped of mixed gas control system, cooling tower for optional.

           Model            Parameter

Lab usage

Production usage

NTI-CJL-42L

NTI-CJL-100L

NTI-CJL-196L

NTI-CJL-339L

NTI-CJL-803L

Working size

mm

300×600

400x800

500×1000

600x1200

800x1600

Heating type

/

IF induction heating

Crucible

/

Graphite

Control type

/

Thyristor control or IGBT control ( optional )

HT zone capacity

L

42

100

196

339

803

Loading weight

g

  HT zone capacity × density (g/cm³)×1000        Remark1L=1000cm³

Ultimate vacuum

Pa

50

IF power 

Kw

100

150

200

250

350

Max. working temperature

2500

2500

2500

2500

2500

Vapor deposition temperature

Within 2000

Within 2000

Within 2000

Within 2000

Within 2000

Temperature uniformity

±5

±5

±10

±10

±10

Overall dimension

mm

5000x6000

5500x6500

6000x7000

6500x7500

7000x8000

Weight

Kg

 

 

 

 

 

Working environment

/

Vacuum, Argon, Nitrogen, Hydrogen atmosphere protection

Vapor deposition environment

/

300-3000pa air pressure, charging into CHCHCH, CH4, C3H6.

 

 

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